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3D detectors with very small electrode spacing can provide ultra-fast detection due to their extremely small charge collection time. Since the detector full depletion voltage and charge collection time are independent to the detector thickness, ultra-fast 3D detectors can be made relatively thick (or not too thin, ~200 μm) to ensure a large signal. The results of the 3D simulations and modeling of 3D silicon detectors with very small electrode spacing and relatively large thickness will be shown in this paper. The column spacing LP is in the range of 5 μm to 10 μm. At a bias voltage of only a few volts, the electric field in the detector can be large enough to ensure the carrier saturation drift velocity in most volume of the detector, and the detector charge collection time there can be as short as 10’s of ps. In this paper, we will analysis the simulated electrical characteristics of this detector structure through systematic 3D simulations using the Silvaco’s TCAD tool. Profiles of detector electric potential and electric field will be presented. We will investigate the region of low electric field (the “slow region”) in the detector. We will also exam whether the detector reach the breakdown condition at operation voltages suggested in this work

3D Simulation and Modeling of Ultra-fast 3D Silicon Detectors