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Nowadays, the care and welfare pneumatic devices to support a nursing care and a self-reliance of the elderly and the disabled are actively researched and developed by many researchers. These wearable devices require many actuators and control valves for multi degrees of freedom. The total weight and volume of the wearable devices increases according to the degree of freedom. Our final goal is to develop a compact wearable actuator with built-in sensor, controller and control valve and to apply it to a wearable assisted device. In our previous study, a small-sized quasi-servo valve which consists of two on/off control valves and an embedded controller was developed. In this study, the quasi-servo valve composing of much smaller-sized (40% in mass, 42% in volume) on/off valves is proposed and tested. In addition, the rubber artificial muscle with an ultrasonic sensor as a built-in displacement sensor is proposed and a position control of the muscle is carried out using the tested tiny valve and built-in sensor. As a result, it was confirmed that the position control of the muscle can be realized using the tested ultrasonic sensor

Miniaturization of a Quasi-Servo Valve and Its Application to Positon Control of a Rubber Artificial Muscle with Built-in Sensor