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Digital photonic production of 3D microfluidic devices and assembled micro mechanicsinside fused silica glass is carried out using In-volume Selective Laser-induced Etching (ISLE).From CAD data of digital 3D objects the trajectories of the laser focus are automatically generated. The CAM software has been developed controlling different fs- and ps-lasers, the beam deflection systems and the translation stages to produce the structures automatically

Digital photonic production of 3D micro fluidics in glass by high speed micro scanner