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We present the development of a MEMS piezoelectric bimorph generator, a cantilever type bimorph which was formed by laminating two PZT piezoelectric layers. Our bimorph generator can scavenge mechanical energy from ambient vibrations and transform it into useful electrical energy. Two poling configurations of the PZT piezoelectric layers of our bimorph MEMS generator were fabricated and tested. A tip proof mass used for adjusting the resonance frequency was also demonstrated. Experimental results confirm that our device possessed a maximum open-circuit output voltage of 1.91VP-P and a 3.42VP-P for a parallel polarization device and a serial polarization device, respectively with a 2g externally applied vibration. At an optimal resistive load, the maximum output power was 1.548μ–W and 1.778μ–W for a parallel polarization device and a serial polarization device, respectively.

Fabrication and Evaluation of a MEMS Piezoelectric Bimorph Generator for Vibration Energy Harvesting