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We report on the development of commercially fabricated multi-chroic antennacoupled Transition Edge Sensor (TES) bolometer arrays for Cosmic MicrowaveBackground (CMB) polarimetry experiments. CMB polarimetry experiments havedeployed instruments in stages. Stage-II experiments deployed with O(1,000)detectors and reported successful detection of B-mode (divergent free)polarization pattern in the CMB. Stage-III experiments have recently startedobserving with O(10,000) detectors with wider frequency coverage. A concept fora Stage-IV experiment, CMB-S4, is emerging to make a definitive measurement ofCMB polarization from the ground with O(400,000) detectors. The orders ofmagnitude increase in detector count for CMB-S4 requires a new approach indetector fabrication to increase fabrication throughput.and reduce cost. Wereport on collaborative efforts with two commercial micro-fabrication foundriesto fabricate antenna coupled TES bolometer detectors. The detector design isbased on the sinuous antenna coupled dichroic detector from the POLARBEAR-2experiment. The TES bolometers showed the expected I-V response and the RFperformance agrees with simulation. We will discuss the motivation, designconsideration, fabrication processes, test results, and how industrial detectorfabrication could be a path to fabricate hundreds of detector wafers for futureCMB polarimetry experiments.

Commercialization of micro-fabrication of antenna-coupled Transition Edge Sensor bolometer detectors for studies of the Cosmic Microwave Background