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A precision micromotion stage is significant in the microelectronics-manufacturing field to realize high-performance tasks. The output position error and limited frequency response influence the working performance and efficiency of the micromotion stage. A novel piezoelectric-based (PZT) reciprocating micromotion stage with a special spring-PZT structure is proposed in this paper to cater to the high manufacturing demands and achieve rapid precision micromotion performance. This structure is designed to use a high-stiffness spring element as the flexure deformation structure, by utilizing the linearity of the spring, for achieving precise output/input ratio and high-frequency response. The feasibility of the micromotion stage is explored through theoretical analyses, including a dynamic response analysis, frequency response analysis, output displacement, and rapidity analysis of the specialized spring-PZT structure. For the inherent hysteresis challenge of the PZT-based structure, a feedforward subdivided proportional–integral–derivative method is adopted for system implementation. Subsequently, an optimal design of the stage is established, and the expected motion performance is verified experimentally. Finally, a series of experiments in terms of output ratio property analysis, dynamic hysteresis characterization, tracking error performance, and response rapidity are conducted for different micromotion frequencies and strokes. It is indicated that the stage can achieve nanometre-level precision and high-frequency micromotion simultaneously, which could be applied in the microelectronics manufacturing for rapid precision micromotion operations.

Implementation and experiment of a novel piezoelectric-spring stage for rapid high-precision micromotion