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We fabricate and compare nanocomposite thin-film ZnO chemoresistive acetonesensors with gold or palladium nanoparticles on the surface, at low operatingtemperatures. The sensors are fabricated by pulsed laser deposition and operatein the temperature range 159-200oC. The ZnO films are polycrystalline,crystallizing mainly at the (002) and (101) orientations of the hexagonalphase. The nanocomposite ZnO:Au and ZnO:Pd sensors have a lower detection limitand show a response enhancement factor between 2-7, compared with pure ZnOsensors. The ZnO:Pd sensor performs better than the ZnO:Au sensor. The ZnO:Pdsensor sensitivity increases with the amount of palladium on the surface, whileit remains roughly unchanged with the ZnO thickness. The lowest acetoneconcentration we detect is 26 ppm for the operating temperature of 200oC.

Pulsed laser deposition of ZnO thin films decorated with Au and Pd nanoparticles with enhanced acetone sensing performance